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| MS54XX (RoHS*) MINIATURE SMD PRESSURE SENSOR * * * * * * 1, 5, 7, and 12 bar absolute pressure range Uncompensated Piezoresistive silicon micromachined sensor Miniature surface mount 6.2 x 6.4 mm Low noise, high sensitivity, high linearity RoHS-compatible & Pb-free* DESCRIPTION The MS54XX SMD pressure sensor series is designed for pressure sensor systems with highest demands on resolution and accuracy. The device consists of a silicon micromachined pressure sensor die mounted on a 6.2 x 6.4 mm ceramic carrier protected by a metal cap. The MS54XX can be delivered in a highly sensitive version giving a maximal output voltage or in a highly linear version giving a linear output voltage directly proportional to the applied pressure. Full Scale Pressure 1 bar 5 bar 7 bar 12 bar MS5407-AM 392 mV / 0.2% FS MS5412-BM 150 mV / 0.05% FS High Sensitivity Versions Product Code MS5401-AM High Linearity Versions Product Code MS5401-BM MS5405-BM Full Scale Span / Linearity 240 mV / 0.2% FS Full Scale Span / Linearity 150 mV / 0.05% FS 150 mV / 0.05% FS FEATURES * Low cost SMD ceramic package * Small size * High reliability, low drift * -40 to +125 C operation range C * Gel protection against humidity and water APPLICATIONS * Absolute pressure sensor systems * High resolution altimeters, variometers * Barometers * Engine controls * Water proof watches and diver's computers * Tire pressure monitoring systems (TPMS) PIN CONFIGURATION 3: VS+ 4: OUT+ 1: OUT- 2: GND * The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment) bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers (PBDE). DA54XX_011 000054xx280 ECN 927 May 9th, 2007 1 PIN DESCRIPTION Pin Name OUTGND VS+ OUT+ Pin No. 1 2 3 4 Function Negative output voltage of Wheatstone bridge Ground Supply voltage of Wheatstone bridge Positive output voltage of Wheatstone bridge ABSOLUTE MAXIMUM RATINGS Parameter Supply voltage Storage temperature Overpressure MS5401-AM MS5401-BM MS5407-AM MS5405-BM MS5412-BM Symbol VS+ TS P Conditions Ta = 25 C o Min -40 - Max 20 +125 5 10 21 30 30 Unit o Notes V C (1) (2) (3) - Ta = 25 C o bar NOTES 1) The MS5401-BM is qualified referring to ISO Standard 2281 and can withstand an absolute pressure of 11 bar in salt water or 100 m water respectively. 2) The MS5407-AM is qualified referring to ISO Standard 2281 and can withstand an absolute pressure of 21 bar in salt water or 200 m water respectively. 3) The MS5405-BM is qualified referring to ISO Standard 2281 and can withstand an absolute pressure of 26 bar in salt water or 250 m water respectively. DA54XX_011 000054xx280 ECN 927 May 9th, 2007 2 ELECTRICAL CHARACTERISTICS HIGH SENSITIVITY VERSIONS (VS+ = 5 V; Ta = 25 ) C Parameter Operating pressure range MS5401-AM Full-scale span (FS) Sensitivity Linearity Operating pressure range MS5407-AM Full-scale span (FS) Sensitivity Linearity Operating temperature range Zero pressure offset Pressure hysteresis All Ranges Temperature hysteresis Repeatability Bridge resistance Temperature coefficient of resistance Temperature coefficient of span Temperature coefficient of offset Min 0 190 190 0 322 46 -40 -40 3.0 +2'400 -1'500 -80 Typ 240 240 0.15 392 56 0.15 0 0.3 3.4 2'900 -1'900 - Max 1 290 290 0.4 7 462 66 0.4 125 40 0.20 0.8 0.20 3.8 +3'300 -2'300 +80 Unit bar mV mV/bar % FS bar mV mV/bar % FS C mV % FS % FS % FS k ppm/C ppm/C V/C Notes 1, 6 2, 6 3, 6 4, 6 5, 6 5, 6 5, 6 NOTES 1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range. 2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating pressure range. 3) Maximum difference in offset after one thermal cycle from -40 to +125 C C. 4) Same as 2) after 10 pressure cycles. 5) Slope of the end-point straight line from 25 to 60 C C. 6) Not 100% tested. DA54XX_011 000054xx280 ECN 927 May 9th, 2007 3 ELECTRICAL CHARACTERISTICS (CONT.) HIGH LINEARITY VERSIONS (VS+ = 5 V; Ta = 25 ) C Parameter Operating pressure range MS5401-BM Full-scale span (FS) Sensitivity Linearity Operating pressure range MS5405-BM Full-scale span (FS) Sensitivity Linearity Operating pressure range MS5412-BM Full-scale span (FS) Sensitivity Linearity Operating temperature range Zero pressure offset Pressure hysteresis All Ranges Temperature hysteresis Repeatability Bridge resistance Temperature coefficient of resistance Temperature coefficient of span Temperature coefficient of offset Min 0 120 120 0 120 24 0 120 10 -40 -40 3.0 +2'400 -1'500 -80 Type 150 150 0.05 150 30 0.05 150 12.5 0.05 0 0.3 3.4 2'900 -1'900 - Max 1 180 180 0.2 5 180 36 0.15 12 180 15 0.15 125 40 0.20 0.8 0.20 3.8 +3'300 -2'300 +80 Unit bar mV mV/bar % FS bar mV mV/bar % FS bar mV mV/bar % FS C mV % FS % FS % FS k ppm/C ppm/C V/C Notes 8 1, 6 8 1, 6 8 1, 6 2, 6 3, 6 4, 6, 7 5, 6 5, 6 5, 6 NOTES 1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range. 2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating pressure range. 3) Maximum difference in offset after one thermal cycle from -40 to +125 C C. 4) Same as 2) after 10 pressure cycles. 5) Slope of the end-point straight line from 25 to 60 C C. 6) Not 100% tested. 7) MS5412-BM: Max. 0.3% FS 8) This sensor family is optimised for the linearity; it is suitable for applications with higher pressure where the linearity requirement is less critical. DA54XX_011 000054xx280 ECN 927 May 9th, 2007 4 APPLICATION INFORMATION GENERAL The MS54XX is a miniaturised absolute pressure sensor series which has been designed for surface mounting applications. Its main advantages are the high reliability of the semiconductor sensor and a design which makes it suitable for applications requiring small-scale and cost-efficient solutions. The sensor element of the MS54XX consists of a micromachined silicone membrane with Pyrex glass waferbonded under vacuum to the backside for reference pressure. Implanted resistors make use of the piezoresistive effect to sense pressure applied to the membrane. The sensor is mounted in a special process allowing best-offset stability making the part suitable for direct PCB assembly. Typical applications for this miniaturised pressure sensor MS54XX are altitude measurements and the measurement of atmospheric reference pressure in medical and industrial equipment as well as in automotive and household applications, consumer electronics and pneumatics. Full Scale Pressure 1 bar 5 bar 7 bar 12 bar HUMIDITY, WATER PROTECTION The MS54XX carries a anticorrosive and antimagnetic stainless steel protection cap filled with silicone gel for enhanced protection against humidity. The properties of this gel ensure function of the sensor even when in direct water contact. This feature can be useful for waterproof watches or other applications, where direct water contact cannot be avoided. Nevertheless the user should avoid drying of hard materials like for example salt particles on the silicone gel surface. In this case it is better to rinse with clean water afterwards. Special care has to be taken to not mechanically damage the gel. Damaged gel could lead to air entrapment and consequently to unstable sensor signal, especially if the damage is close to the sensor surface. The metal cap is fabricated of special anticorrosive stainless steel in order to avoid any corrosive battery effects inside the final product. The MS5401-BM are qualified referring to the ISO Standard 2281 and can withstand a pressure of 11 bar in salt water. The concentration of the see water used for the qualification is 41 g of see salt for 1 litre of DI water. The MS5405-BM and the MS5407-AM did also pass the salt-water test with a pressure capability of 26 and 21 bar respectively. For underwater operations as specified in ISO Standard 2281 it is important to seal the sensor with a rubber Oring around the metal cap. Any salt water coming to the contact side (ceramic and pads) of the sensor could lead to permanent damage. Especially for "water-resistant 100 m" watches and for diving computers, it is recommended to provide a stable mechanical pusher from the backside of the sensor. Otherwise the overpressure might push the sensor backwards and even bend the electronic board on which the sensor is mounted. LIGHT SENSITIVITY The MS54XX is sensitive to sunlight, especially to infrared light sources. This is due to the strong photo effect of silicon. As the effect is reversible there will be no damage, but the user has to take care that in the final product the sensor cannot be exposed to direct light during operation. This can be achieved for instance by placing mechanical parts with holes in such that light cannot pass. DA54XX_011 May 9th, 2007 5 Electronic Scale High Sensitivity Versions (MS54XX-AM) Variometer, Altimeter, Barometer High Linearity Versions (MS54XX-BM) High End Altimeter, Medical Instrumentation Diving computers labelled 250 m Divers Watch, Tire Pressure, High End Electronic Scale Pneumatic Brake, Diving Computer 000054xx280 ECN 927 CONNECTION TO PCB The package outline of the module allows the use of a flexible PCB to connect it. This can be important for applications in watches and other special devices, and will also reduce mechanical stress on the device. For applications subjected to mechanical shock, it is recommended to enhance the mechanical reliability of the solder junctions by covering the rim or the corners of MS54XX ceramic substrate with glue or Globtop-like material. SOLDERING Please refer to the application note AN808 for all soldering issues. CLEANING The MS54XX has been manufactured under cleanroom conditions. Each device has been inspected for the homogeneity and the cleanness of the silicone gel. It is therefore recommended to assemble the sensor under class 10'000 or better conditions. Should this not be possible, it is recommended to protect the sensor opening during assembly from entering particles and dust. To avoid cleaning of the PCB, solder paste of type "no-clean" shall be used. Cleaning might damage the sensor. RECOMMENDED PAD LAYOUT Recommended pad layout for soldering of the MS54XX on a printed circuit board DA54XX_011 000054xx280 ECN 927 May 9th, 2007 6 PACKAGE OUTLINES Device package outlines of MS54XX-YM (M = anticorrosive and antimagnetic stainless steel cap) DA54XX_011 000054xx280 ECN 927 May 9th, 2007 7 PACKING The MS54XX is packed in a 51 cm (20-inch) antistatic plastic tube with rubber end-plugs of two different colours: One green and one black. The dot on the ceramic next to Pin 1 is facing the green end-plug. Each tube contains 80 sensors. The tubes are marked "ANTISTATIC" and have an information label. See the drawings below for more details. PACKING TUBE OUTLINES 4.4 Information label 8.2 510 All measures in mm ORDERING INFORMATION MS5401-AM Miniature Pressure Sensor 1 bar, high sensitivity MS5401-BM Miniature Pressure Sensor 1 bar, high linearity MS5405-BM Miniature Pressure Sensor 1 bar, high linearity MS5407-AM Miniature Pressure Sensor 7 bar, high sensitivity MS5412-BM Miniature Pressure Sensor 12 bar, high linearity A = high sensitivity B = high linearity M = anticorrosive and antimagnetic stainless steel cap Art.-Nr. 325401001 Art.-Nr. 325401000 Art.-Nr. 325405000 Art.-Nr. 325407000 Art.-Nr. 325412000 FACTORY CONTACTS Intersema Sensoric SA Ch. Chapons-des-Pres 11 CH-2022 BEVAIX SWITZERLAND Tel. 032 847 9550 Tel. Int. +41 32 847 9550 Telefax +41 32 847 9569 e-mail: http://www.intersema.ch NOTICE Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance and to supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys no license under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from patent infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or warranty that such applications will be suitable for the use specified without further testing or modification. DA54XX_011 000054xx280 ECN 927 May 9th, 2007 8 |
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